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【英文标准名称】:StandardTestMethodforTraceMetallicImpuritiesinElectronicGradeAluminumbyHighMass-ResolutionGlow-DischargeMassSpectrometer
【原文标准名称】:应用高质量分辩率辉光放电质谱计测定电子级铝中微量金属杂质的标准试验方法
【标准号】:ASTMF1593-2008
【标准状态】:现行
【国别】:美国
【发布日期】:2008
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.17
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:
【英文主题词】:aluminum;electronics;glowdischargemassspectrometer(GDMS);purityanalysis;sputteringtarget;tracemetallicimpurities;Aluminumelectricalconductors(semiconductors);Glowdischargemassspectrometer(GDMS);High-purityaluminum;Impurities--
【摘要】:Thistestmethodisintendedforapplicationinthesemiconductorindustryforevaluatingthepurityofmaterials(forexample,sputteringtargets,evaporationsources)usedinthinfilmmetallizationprocesses.Thistestmethodmaybeusefulinadditionalapplications,notenvisionedbytheresponsibletechnicalcommittee,asagreeduponbythepartiesconcerned.ThistestmethodisintendedforusebyGDMSanalystsinvariouslaboratoriesforunifyingtheprotocolandparametersfordeterminingtraceimpuritiesinpurealuminum.Theobjectiveistoimprovelaboratorytolaboratoryagreementofanalysisdata.ThistestmethodisalsodirectedtotheusersofGDMSanalysesasanaidtounderstandingthedeterminationmethod,andthesignificanceandreliabilityofreportedGDMSdata.Formostmetallicspeciesthedetectionlimitforroutineanalysisisontheorderof0.01weightppm.Withspecialprecautionsdetectionlimitstosub-ppblevelsarepossible.Thistestmethodmaybeusedasarefereemethodforproducersandusersofelectronic-gradealuminummaterials.1.1Thistestmethodcoversmeasuringtheconcentrationsoftracemetallicimpuritiesinhighpurityaluminum.1.2Thistestmethodpertainstoanalysisbymagnetic-sectorglowdischargemassspectrometer(GDMS).1.3Thealuminummatrixmustbe99.9weight%(3N-grade)pure,orpurer,withrespecttometallicimpurities.Theremustbenomajoralloyconstituent,forexample,siliconorcopper,greaterthan1000weightppminconcentration.1.4ThistestmethoddoesnotincludealltheinformationneededtocompleteGDMSanalyses.Sophisticatedcomputer-controlledlaboratoryequipmentskillfullyusedbyanexperiencedoperatorisrequiredtoachievetherequiredsensitivity.Thistestmethoddoescovertheparticularfactors(forexample,specimenpreparation,settingofrelativesensitivityfactors,determinationofsensitivitylimits,etc.)knownbytheresponsibletechnicalcommitteetoaffectthereliabilityofhighpurityaluminumanalyses.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:L90
【国际标准分类号】:77_040_99
【页数】:7P.;A4
【正文语种】:英语